Resonant Inc.
PASSIVE PRESSURE SENSOR WITH A PIEZOELECTRIC DIAPHRAGM AND A NON-PIEZOELECTRIC SUBSTRATE

Abstract:

There are disclosed pressure-sensitive acoustic resonators and remote pressure sensing systems and methods. A pressure-sensitive acoustic resonator includes a conductor pattern formed on a planar surface of a non-piezoelectric substrate, the conductor pattern including an interdigital conductor pattern (ICP); and a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP.