Resonant Inc.
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH INTEGRATED PASSIVE DEVICE

Abstract:

Acoustic resonator devices, filter devices, and methods of making acoustic resonator devices and filter devices. An acoustic resonator device includes a piezoelectric plate, wherein a portion of the piezoelectric plate forms a diaphragm that spans a cavity. An interdigital transducer (IDT) is formed on a front surface of the piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. An integrated passive device circuit (IPD) is connected to the IDT.