Resonant Inc.
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH REDUCED LOSS IN THE APERTURE DIRECTION

Abstract:

Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, the back surface facing a substrate. A conductor pattern is formed on the front surface. The conductor pattern includes interleaved interdigital transducer (IDT) fingers connected alternately to first and second busbars, wherein a mark mt of the IDT fingers in margins of an aperture is greater than a mark m of the IDT fingers in a central portion of the aperture.