Resonant Inc.
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATORS WITH IMPROVED EDGE EFFECTS

Abstract:

Acoustic resonators, acoustic filter devices and methods of making the same. An acoustic resonator device includes a piezoelectric plate having front and back surfaces, an interdigital transducer (IDT) on the front surface including interleaved fingers, an overlapping distance of the interleaved fingers defining an aperture of the acoustic resonator device, and a modified acoustic velocity region proximate an edge of the aperture.