Resonant Inc.
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH MULTI-MARK INTERDIGITAL TRANSDUCER

Abstract:

Acoustic resonator devices and acoustic filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces. The back surface is attached to a surface of a substrate, and a portion of the piezoelectric plate forms a diaphragm spanning a cavity in the substrate. A conductor pattern is formed on the front surface. The conductor pattern includes a multi-mark interdigital transducer (IDT), with fingers of the IDT on the diaphragm.