Resonant Inc.
WIDE BANDWIDTH TEMPERATURE-COMPENSATED TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR

Abstract:

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal lithium niobate (LN) plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the LN plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the LN plate such that interleaved fingers of the IDT are disposed on the diaphragm. A half-lambda dielectric layer is formed on one of the front surface and back surface of the diaphragm. Euler angles of the LN plate are [0.degree., .beta., 0.degree.], where 20.degree..ltoreq..beta..ltoreq.25.degree..