Resonant Inc.
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH PARTIAL BRAGG REFLECTORS

Abstract:

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The piezoelectric plate and the IDT are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode in the diaphragm. A back-side partial Bragg reflector is formed on the back surface of the diaphragm, and a front-side partial Bragg reflector is formed on the front surface of the diaphragm.