Resonant Inc.
Transversely-excited film bulk acoustic filters with symmetric layout

Abstract:

There are disclosed acoustic resonators and radio frequency filter devices. An acoustic resonator includes a piezoelectric plate having a front surface. A conductor pattern is formed on the front surface, the conductor pattern including interdigital transducers (IDTs) of one or more pairs of sub-resonators, each pair consisting of two sub-resonators. The two sub-resonators of each pair of sub-resonators are positioned symmetrically about a central axis.