Resonant Inc.
Solidly mounted transversely excited film bulk acoustic resonator using rotated Z-cut lithium niobate

Abstract:

Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate and a lithium niobate (LN) plate having front and back surfaces. An acoustic Bragg reflector is sandwiched between the surface of the substrate and the back surface of the lithium niobite plate. An interdigital transducer (IDT) is formed on the front surface of the LN plate. The Euler angles of the lithium niobate plate are [0.degree., .beta., 90.degree. ], where .beta. is greater than or equal to -15.degree. and less than 0.degree..