Resonant Inc.
Film bulk acoustic resonators in thin LN-LT layers

Abstract:

Acoustic resonator devices, filter devices, and methods of fabrication are disclosed. A resonator device includes a substrate having a surface and a single-crystal piezoelectric plate including one of rotated Y-cut lithium niobate and rotated Y-cut lithium tantalate. The single-crystal piezoelectric plate has a front surface and a back surface opposite the front surface, wherein the back surface is coupled to the surface. A floating back-side conductor pattern is formed on a portion of the back surface. A front-side conductor pattern consisting of two electrodes is formed on a portion of the front surface opposite the back-side conductor, wherein a radio frequency applied between the two electrodes excites a primary acoustic mode in the single-crystal piezoelectric plate.