Resonant Inc.
Temperature compensated acoustic wave devices

Abstract:

Surface acoustic wave (SAW) resonator, SAW filters, and methods of fabricating SAW filters. A first plurality of parallel conductors extending from a first bus bar are formed on a surface of a 128-degree Y-cut lithium niobate substrate. A second plurality of parallel conductors extending from a second bus bar are formed on the surface of the substrate, the second plurality of parallel conductors interleaved with the first plurality of parallel conductors. An SiO2 layer overlays the first and second pluralities of parallel conductors. The first and second pluralities of parallel conductors are substantially copper and have a thickness D.sub.CU defined by 0.12P.ltoreq.D.sub.CU.ltoreq.0.24P, where P is a center-to-center spacing of adjacent parallel conductors. The SiO2 layer has a thickness D.sub.OX defined by 3.1D.sub.CU.ltoreq.D.sub.OX.ltoreq.4.5D.sub.CU.