RTX Corporation
NANOPARTICLE FORMATION MITIGATION IN A DEPOSITION PROCESS
Last updated:
Abstract:
A system for depositing coating on a workpiece includes a deposition chamber within which is formed a vortex to at least partially surround a workpiece therein.
Status:
Application
Type:
Utility
Filling date:
2 Jul 2020
Issue date:
22 Oct 2020