SiTime Corporation
Temperature-reporting oscillator
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Abstract:
In an integrated circuit device having a microelectromechanical-system (MEMS) resonator and a temperature transducer, a clock signal is generated by sensing resonant mechanical motion of the MEMS resonator and a temperature signal indicative of temperature of the MEMS resonator is generated via the temperature transducer. The clock signal and the temperature signal are output from the integrated circuit device concurrently.
Status:
Grant
Type:
Utility
Filling date:
1 Oct 2020
Issue date:
8 Feb 2022