SiTime Corporation
Frequency-modulating sensor array

Last updated:

Abstract:

Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of a sensed property, such as regional contact forces, ambient conditions and/or environmental composition. The resonant MEMS sensors generate signals that oscillate at respective frequencies corresponding to the sensed property, increasing or decreasing in frequency in response to an increase or decrease in that property to effect a frequency-modulated digital output.

Status:
Grant
Type:

Utility

Filling date:

12 Sep 2017

Issue date:

3 May 2022