SiTime Corporation
Micromachined thermistor
Last updated:
Abstract:
A micromachined apparatus includes micromachined thermistor having first and second ends physically and thermally coupled to a substrate via first and second anchor structures to enable a temperature-dependent resistance of the micromachined thermistor to vary according to a time-varying temperature of the substrate. The micromachined thermistor has a length, from the first end to the second end, greater than a linear distance between the first and second anchor structures.
Status:
Grant
Type:
Utility
Filling date:
8 Mar 2018
Issue date:
29 Oct 2019