SiTime Corporation
Temperature sensor based on ratio of clock signals from respective MEMS resonators
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Abstract:
In a high resolution temperature sensor, first and second MEMS resonators generate respective first and second clock signals and a locked-loop reference clock generator generates a reference clock signal having a frequency that is phase-locked to at least one of the first and second clock signals. A frequency-ratio engine within the MEMS temperature sensor oversamples at least one of the first and second clock signals with the reference clock signal to generate a ratio of the frequencies of the first and second clock signals.
Status:
Grant
Type:
Utility
Filling date:
4 Mar 2019
Issue date:
14 Apr 2020