Silicon Laboratories Inc.
ENSURING MINIMUM DENSITY COMPLIANCE IN INTEGRATED CIRCUIT INDUCTORS

Abstract:

In one aspect, an inductor may include at least one loop formed on a first metal layer and a non-uniform introduced pattern formed on the first metal layer and circumscribed by the at least one loop. The non-uniform introduced pattern may be formed of a plurality of structures and may have a maximum density at an interior portion thereof and a minimum density at a peripheral portion thereof, where at least some of the plurality of structures have different sizes.