Synopsys, Inc.
DOSE OPTIMIZATION TECHNIQUES FOR MASK SYNTHESIS TOOLS

Abstract:

A method comprises receiving an integrated circuit (IC) chip design, and generating, by one or more processors and based on the IC chip design, dose information, a wafer image, and a wafer target. Further, the method comprises modifying, by the one or more processors, the dose information based on a comparison of the wafer image and the wafer target. Further, the method comprises outputting the modified dose information to a mask writing device.