Synopsys, Inc.
Optical source compensation

Abstract:

A method of compensating for degradation of an optical source includes in part, generating a first model of the optical source at a first point in time, generating a second model of the optical source at a second point in time occurring after the first point in time, determining the difference between the first and second models, and varying a dose of the optical source if the determined difference is greater than a first threshold value. The compensation method optionally includes, in part, varying a focus distance of the optical source if the determined difference is greater than the first threshold value. The generation of the first model optionally includes, in part, generating wafer data from the optical source, and generating an optical proximity correction (OPC) model from the wafer data. The optical source may be an extreme ultraviolet optical source.