Synopsys, Inc.
Method and apparatus with channel stop doped devices
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Abstract:
Methods and apparatuses relate to implanting a surface of a semiconductor substrate with dopants, making undoped semiconductor material directly on the surface implanted with the dopants, and making a transistor with a transistor channel in the undoped semiconductor material, such that the transistor channel of the transistor remains undoped throughout manufacture of the integrated circuit.
Status:
Grant
Type:
Utility
Filling date:
12 Mar 2018
Issue date:
19 Nov 2019