Sony Group Corporation
FLUID CONTROL APPARATUS AND ELECTRONIC APPARATUS

Abstract:

[Object] To provide a fluid control apparatus having a diaphragm structure and small flow path resistance. [Solving Means] A fluid control apparatus according to the present technology includes a first space, two flat plate members, a drive mechanism, a second space, a first check valve, and a second check valve. The first space has an inlet and an outlet. The two flat plate members face each other via the first space, and at least one of the flat plate members is an elastic body having flexibility. The drive mechanism bends the elastic body. The second space adjoins the first space, communicates with the first space via the inlet, and has a suction port. The first check valve allows fluid to flow from the suction port to the first space via the inlet. The third space adjoins the first space, communicates with the first space via the outlet, and has a discharge port. The second check valve allows the fluid to flow from the first space to the discharge port via the outlet. At least one of the suction port and the discharge port is positioned on an extension surface of at least one of the two flat plate members.