Skyworks Solutions, Inc.
ALUMINUM NITRIDE DOPANT SCHEME FOR BULK ACOUSTIC WAVE FILTERS
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Abstract:
Disclosed is an acoustic wave resonator comprising a substrate material formed of aluminum nitride (AlN) doped with one or more of beryllium (Be), strontium (Sr), and sodium (Na) to enhance performance of the acoustic wave resonator.
Status:
Application
Type:
Utility
Filling date:
26 Feb 2021
Issue date:
2 Sep 2021