Skyworks Solutions, Inc.
SUBSTITUTED ALUMINUM NITRIDE FOR IMPROVED ACOUSTIC WAVE FILTERS
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Abstract:
An acoustic wave resonator comprises a piezoelectric material formed of aluminum nitride (AlN) doped with calcium (Ca) to enhance performance of the acoustic wave resonator.
Status:
Application
Type:
Utility
Filling date:
5 May 2021
Issue date:
9 Sep 2021