Skyworks Solutions, Inc.
Surface acoustic wave device having mass-loaded electrode

Abstract:

Surface acoustic wave device having mass-loaded electrode. In some embodiments, a surface acoustic wave device for providing resonance of a surface acoustic wave having a wavelength .lamda. can include a quartz substrate and a piezoelectric plate formed from LiTaO.sub.3 or LiNbO.sub.3 disposed over the quartz substrate. The piezoelectric plate can have a thickness greater than 2.lamda.. The surface acoustic wave device can further include an interdigital transducer electrode formed over the piezoelectric plate. The interdigital transducer electrode can have a mass density .rho. in a range 1.50 g/cm.sup.3<.rho..ltoreq.6.00 g/cm.sup.3, 6.00 g/cm.sup.3<.rho..ltoreq.12.0 g/cm.sup.3, or 12.0 g/cm.sup.3<.rho..ltoreq.23.0 g/cm.sup.3, and a thickness greater than 0.148.lamda., greater than 0.079.lamda., or greater than 0.036.lamda., respectively.