Skyworks Solutions, Inc.
Suppression of spurious signals in surface acoustic wave devices
Last updated:
Abstract:
An acoustic wave device comprises a substrate including a piezoelectric material, interdigital transducer (IDT) electrodes disposed on an upper surface of the substrate. The IDT electrodes having gap regions, edge regions, and center regions. A duty factor of the IDT electrodes in the edge regions is greater than the duty factor of the IDT electrodes in the center regions. A first dielectric film is disposed above the IDT electrodes and an upper surface of the substrate. The first dielectric film has a greater thickness in portions of the center regions than in portions proximate the gap regions.
Status:
Grant
Type:
Utility
Filling date:
25 Aug 2020
Issue date:
13 Sep 2022