Tower Semiconductor Ltd.
SOLID-STATE IMAGING APPARATUS
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Abstract:
A solid-state imaging apparatus includes photoelectric conversion regions arranged close to a surface of a semiconductor substrate and a recessed portion provided above each photoelectric conversion region in the semiconductor substrate. Further, the solid-state imaging apparatus includes a light transmissive film embedded in the recessed portion. With this configuration, the performance of the solid-state imaging apparatus is improved, such as improvement of sensitivity and reduction in color mixture.
Status:
Application
Type:
Utility
Filling date:
23 Aug 2021
Issue date:
24 Feb 2022