Tower Semiconductor Ltd.
Apparatus, system and method of a temperature sensor
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Abstract:
Some demonstrative embodiments include an apparatus of a temperature sensor to sense temperature, the apparatus including a first pad on a silicon substrate; a second pad on the silicon substrate; a silicon nanowire having a first end coupled to the first pad and a second end coupled to the second pad, the silicon nanowire configured to drive a current between the first pad and the second pad, the current depending at least on the temperature; and a charged dielectric layer covering at least three sides of the silicon nanowire.
Status:
Grant
Type:
Utility
Filling date:
7 Dec 2017
Issue date:
29 Sep 2020