Taiwan Semiconductor Manufacturing Company Limited
ADVANCED NODE INTERCONNECT ROUTING METHODOLOGY

Abstract:

In one embodiment, an integrated circuit includes a first pattern metal layer, a second pattern metal layer formed over the first pattern metal layer, wherein the second pattern metal layer comprises a second plurality of metal tracks extending in a first direction and less than 9, a third pattern metal layer disposed between the first pattern metal layer and the second pattern metal layer, the third pattern metal layer including, a first metal track segment, a second metal track segment shifted in a second direction from the first metal track segment, and a third metal track segment shifted in the second direction from the second metal track segment, wherein the second plurality of metal tracks, and at least a portion of each of the first metal track segment, the second metal track segment, and the third metal track segment are within a double cell height in the second direction.