Taiwan Semiconductor Manufacturing Company Limited
SEMICONDUCTOR DEVICE INCLUDING CAPACITOR AND RESISTOR
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Abstract:
A semiconductor device includes a capacitor and a resistor. The capacitor includes a first plate, a capacitor dielectric layer disposed over the first plate, and a second plate disposed over the capacitor dielectric layer. The resistor includes a thin film. The thin film of the resistor and the first plate of the capacitor, formed of a same conductive material, are defined in a single patterning process.
Status:
Application
Type:
Utility
Filling date:
15 Jun 2020
Issue date:
16 Dec 2021