Taiwan Semiconductor Manufacturing Company Limited
FERROELECTRIC TUNNEL JUNCTION DEVICES WITH DISCONTINUOUS SEED STRUCTURE AND METHODS FOR FORMING THE SAME

Abstract:

A memory device, transistor, and methods of making the same, the memory device including a memory cell including: a bottom electrode layer; a high-k dielectric layer disposed on the bottom electrode layer; a discontinuous seed structure comprising discrete particles of a metal disposed on the high-k dielectric layer; a ferroelectric (FE) layer disposed on the seed structure and directly contacting portions of high-k dielectric layer exposed through the seed structure; and a top electrode layer disposed on the FE layer.