Taiwan Semiconductor Manufacturing Company Limited
PIXEL ARRAY INCLUDING AIR GAP REFLECTION STRUCTURES

Abstract:

A pixel array may include air gap reflection structures under a photodiode of a pixel sensor to reflect photons that would otherwise partially refract or scatter through a bottom surface of a photodiode. The air gap reflection structures may reflect photons upward toward the photodiode so that the photons may be absorbed by the photodiode. This may increase the quantity of photons absorbed by the photodiode, which may increase the quantum efficiency of the pixel sensor and the pixel array.