Taiwan Semiconductor Manufacturing Company Limited
Variable width nano-sheet field-effect transistor cell structure
Last updated:
Abstract:
One aspect of this description relates to a method for operating an integrated circuit (IC) manufacturing system. The method includes placing a first nano-sheet structure within a IC layout diagram. The first nano-sheet structure has a first width. The method includes abutting a second nano-sheet structure with the first nano-sheet structure. The second nano-sheet structure has a second width. The second width is less than the first width. The method includes generating and storing the IC layout diagram in a storage device.
Status:
Grant
Type:
Utility
Filling date:
12 Mar 2021
Issue date:
30 Aug 2022