Taiwan Semiconductor Manufacturing Company Limited
Dual channel transistor device and methods of forming the same

Abstract:

A semiconductor device includes a source region and a drain region laterally spaced from each other and overlying a substrate, a metal oxide semiconductor channel layer overlying, and contacting, the source region and the drain region, a first gate dielectric layer overlying a portion of the metal oxide semiconductor channel layer, a first gate electrode overlying the first gate dielectric layer and contacting a portion of the metal oxide semiconductor channel layer, a second gate dielectric layer contacting a sidewall of the metal oxide semiconductor channel layer, and a second gate electrode contacting a sidewall of the second gate dielectric layer and spaced from the metal oxide semiconductor channel layer by the second gate dielectric layer. The first gate electrode may be a floating gate that stores electrical charges, and turns on or off a first transistor including the source region and the drain region.