Taiwan Semiconductor Manufacturing Company Limited
Zero Mask High Density Capacitor
Last updated:
Abstract:
Methods and semiconductor devices are described herein which eliminate the use of additional masks. A first interconnect layer is formed. A first resistive layer is formed on top of the first interconnect layer. A dielectric layer is formed on top of the first resistive layer. A second resistive layer is formed on top of the dielectric layer.
Status:
Application
Type:
Utility
Filling date:
16 Jan 2020
Issue date:
26 Nov 2020