Taiwan Semiconductor Manufacturing Company Limited
SEMICONDUCTOR ARRANGEMENT WITH CAPACITOR AND METHOD OF FABRICATING THE SAME
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Abstract:
A semiconductor arrangement includes an active region including a semiconductor device. The semiconductor arrangement includes a capacitor. The capacitor includes a first electrode over at least one dielectric layer over the active region. The first electrode surrounds an open space within the capacitor. The first electrode has a non-linear first electrode sidewall.
Status:
Application
Type:
Utility
Filling date:
8 Nov 2019
Issue date:
5 Mar 2020