Texas Instruments Incorporated
INTEGRATED CIRCUIT WITH SCRIBE LANE PATTERNS FOR DEFECT REDUCTION

Abstract:

An integrated circuit includes a circuit area, and first and second scribe line portions. The first scribe line portion borders a first side of the circuit area, and the second scribe line portion borders a different second side of the circuit area. A plurality of dummy metal structures are located in the first and second scribe line portions, each of the dummy metal structures being located about at a lattice point of a same two-dimensional grid.