Varex Imaging Corporation
DETECTOR ARCHITECTURE USING PHOTODETECTOR SUBSTRATES AND SEMICONDUCTOR DEVICES
Last updated:
Abstract:
Some embodiments include a method, comprising: providing a semiconductor substrate including photodetectors on a first side of the substrate; attaching at least one semiconductor device to the first side of the semiconductor substrate; attaching a back support plate to the semiconductor substrate over the at least one semiconductor device; and thinning the semiconductor substrate.
Status:
Application
Type:
Utility
Filling date:
23 May 2019
Issue date:
7 May 2020