Varex Imaging Corporation
DETECTOR ARCHITECTURE USING PHOTODETECTOR SUBSTRATES AND SEMICONDUCTOR DEVICES

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Abstract:

Some embodiments include a method, comprising: providing a semiconductor substrate including photodetectors on a first side of the substrate; attaching at least one semiconductor device to the first side of the semiconductor substrate; attaching a back support plate to the semiconductor substrate over the at least one semiconductor device; and thinning the semiconductor substrate.

Status:
Application
Type:

Utility

Filling date:

23 May 2019

Issue date:

7 May 2020