KLA Corporation
MINI-ENVIRONMENT SYSTEM FOR CONTROLLING OXYGEN AND HUMIDITY LEVELS WITHIN A SAMPLE TRANSPORT DEVICE

Abstract:

A mini-environment apparatus is disclosed. The apparatus may include an enclosure including a frame with two or more openings. The frame may define an internal cavity within the enclosure. The apparatus may include a flapper blade coupled to a portion of the frame. The flapper blade may be configured to close at least one opening of the two or more openings of the frame to form a sealed enclosure when the flapper blade is in a closed position. The apparatus may include a floating plate coupled to a portion of the frame. The floating plate may include one or more slots. The apparatus may include one or more shutters coupled a portion of the floating plate to cover the one or more slots.