KLA
Patents, Design & Utilities
Last updated:
List of all KLA patents 357 in total
| Status | Patent |
|---|---|
Grant | Utility: Laser sustained plasma light source with high pressure flow Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: BBP assisted defect detection flow for SEM images Filling date: 6 Sep 2025 Issue date: 20 Sep 2022 |
Grant | Utility: Thin pellicle material for protection of solid-state electron detectors Filling date: 6 Sep 2025 Issue date: 13 Sep 2022 |
Grant | Utility: Broadband light interferometry for focal-map generation in photomask inspection Filling date: 6 Sep 2025 Issue date: 13 Sep 2022 |
Application | Utility: MULTI-FIELD SCANNING OVERLAY METROLOGY Filling date: 6 Sep 2025 Issue date: 8 Sep 2022 |
Application | Utility: Secure Remote Collaboration for Equipment in a Manufacturing Facility Filling date: 6 Sep 2025 Issue date: 1 Sep 2022 |
Grant | Utility: Method of manufacturing a semiconductor device and process control system for a semiconductor manufacturing assembly Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Scanning scatterometry overlay measurement Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: System and method for inspection using tensor decomposition and singular value decomposition Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Computationally efficient x-ray based overlay measurement Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Grant | Utility: Soft gripper with multizone control to allow individual joint articulation Filling date: 6 Sep 2025 Issue date: 30 Aug 2022 |
Application | Utility: Full Beam Metrology For X-Ray Scatterometry Systems Filling date: 6 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: METHODS FOR IMPROVING OPTICAL INSPECTION AND METROLOGY IMAGE QUALITY USING CHIP DESIGN DATA Filling date: 6 Sep 2025 Issue date: 25 Aug 2022 |
Application | Utility: VERTICAL CONVOLUTE METAL BELLOWS FOR ROTARY MOTION, VACUUM SEALING, AND PRESSURE SEALING Filling date: 6 Sep 2025 Issue date: 25 Aug 2022 |
Grant | Utility: Broadband ultraviolet illumination sources Filling date: 6 Sep 2025 Issue date: 23 Aug 2022 |
Application | Utility: Dual Vacuum Seal Filling date: 6 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: SYSTEMS AND METHODS FOR EVALUATING THE RELIABILITY OF SEMICONDUCTOR DIE PACKAGES Filling date: 6 Sep 2025 Issue date: 18 Aug 2022 |
Application | Utility: Method and Apparatus for EUV Mask Inspection Filling date: 6 Sep 2025 Issue date: 18 Aug 2022 |
Grant | Utility: System, method and apparatus for polarization control Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Laser produced plasma light source having a target material coated on a cylindrically-symmetric element Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Multi-controller inspection system Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Controlling a process for inspection of a specimen Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Light modulated electron source Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Statistical learning-based mode selection for multi-mode inspection Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Grant | Utility: Signal-domain adaptation for metrology Filling date: 6 Sep 2025 Issue date: 16 Aug 2022 |
Application | Utility: Methods And Systems For Accurate Measurement Of Deep Structures Having Distorted Geometry Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: THREE-DIMENSIONAL IMAGING WITH ENHANCED RESOLUTION Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: BACK-ILLUMINATED SENSOR WITH BORON LAYER DEPOSITED USING PLASMA ATOMIC LAYER DEPOSITION Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Application | Utility: HIGH RESOLUTION ELECTRON BEAM APPARATUS WITH DUAL-APERTURE SCHEMES Filling date: 6 Sep 2025 Issue date: 11 Aug 2022 |
Grant | Utility: Equi-probability defect detection Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: System and method for generation of wafer inspection critical areas Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Grant | Utility: Machine learning for metrology measurements Filling date: 6 Sep 2025 Issue date: 9 Aug 2022 |
Application | Utility: DESIGN-ASSISTED INSPECTION FOR DRAM AND 3D NAND DEVICES Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: CORRECTING ABERRATION AND APODIZATION OF AN OPTICAL SYSTEM USING CORRECTION PLATES Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: SENSITIVITY IMPROVEMENT OF OPTICAL AND SEM DEFECTION INSPECTION Filling date: 6 Sep 2025 Issue date: 4 Aug 2022 |
Application | Utility: MEASUREMENT OF PROPERTIES OF PATTERNED PHOTORESIST Filling date: 6 Sep 2025 Issue date: 28 Jul 2022 |
Grant | Utility: Apparatus and method for gray field imaging Filling date: 6 Sep 2025 Issue date: 26 Jul 2022 |
Application | Utility: METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION Filling date: 6 Sep 2025 Issue date: 21 Jul 2022 |
Grant | Utility: Metrics for asymmetric wafer shape characterization Filling date: 6 Sep 2025 Issue date: 19 Jul 2022 |
Application | Utility: PROCESS CONDITION SENSING APPARATUS Filling date: 6 Sep 2025 Issue date: 14 Jul 2022 |
Grant | Utility: Method of fabricating particle size standards on substrates Filling date: 6 Sep 2025 Issue date: 12 Jul 2022 |
Application | Utility: SYSTEM AND METHOD FOR FOCUS CONTROL IN EXTREME ULTRAVIOLET LITHOGRAPHY SYSTEMS USING A FOCUS-SENSITIVE METROLOGY TARGET Filling date: 6 Sep 2025 Issue date: 7 Jul 2022 |
Grant | Utility: On-the-fly scatterometry overlay metrology target Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Method for process monitoring with optical inspections Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 |
Grant | Utility: Methods and systems for inspection of semiconductor structures with automatically generated defect features Filling date: 6 Sep 2025 Issue date: 5 Jul 2022 |
Application | Utility: METHOD AND SYSTEM FOR MANUFACTURING INTEGRATED CIRCUIT Filling date: 6 Sep 2025 Issue date: 30 Jun 2022 |
Grant | Utility: Laser closed power loop with an acousto-optic modulator for power modulation Filling date: 6 Sep 2025 Issue date: 28 Jun 2022 |
Application | Utility: MULTI-BEAM ELECTRONICS SCAN Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Application | Utility: Methods And Systems For Compact, Small Spot Size Soft X-Ray Scatterometry Filling date: 6 Sep 2025 Issue date: 23 Jun 2022 |
Showing 1 to 50 of 357 patents.