KLA Corporation
TRAINING A MACHINE LEARNING MODEL TO GENERATE HIGHER RESOLUTION IMAGES FROM INSPECTION IMAGES

Abstract:

Methods and systems for determining information for a specimen are provided. The embodiments described herein are configured for training a machine learning (ML) model for generating higher resolution images of a specimen from images of the specimen generated by an inspection subsystem. The training includes a pre-training step that is performed using only simulated images and a re-training step that is performed using actual images of a test specimen. The higher resolution images generated by the trained ML model from lower resolution inspection images can be used for applications to including nuisance filtering and defect classification.