KLA Corporation
Multi-environment polarized infrared reflectometer for semiconductor metrology

Abstract:

A system includes a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. The system is configured to measure polarized light and unpolarized reflectivities in a wavelength range from 2 .mu.m to 20 .mu.m. The light source can be a laser-driven light source. The spectroscopic reflectometer can include a single channel or two channels.