KLA Corporation
UNSUPERVISED PATTERN SYNONYM DETECTION USING IMAGE HASHING

Abstract:

Images of semiconductor wafers can be hashed to determine a fixed length hash string for each of the images. Pattern synonyms can be determined from the hash strings. The pattern synonyms can be grouped. A degree of similarity between images in the groups is adjustable via a hamming distance. This can be used for various applications, including determination of latent defects.