KLA Corporation
Coolant Microleak Sensor for a Vacuum System

Abstract:

A system includes a vacuum chamber and a component, disposed in the vacuum chamber, that heats up during operation. The system also includes a cooling line, mechanically coupled to the component, to circulate coolant to cool the component during operation. The system further includes a vacuum gauge to measure a total pressure in the vacuum chamber and an analyzer to measure a partial pressure in the vacuum chamber of a substance that can leak from the cooling line.