KLA Corporation
Controlling a process for inspection of a specimen

Abstract:

Methods and systems for controlling a process for inspection of a specimen are provided. One system includes one or more computer subsystems configured for determining a statistical characteristic of difference images generated for multiple instances of a care area on a specimen and determining variation in the statistical characteristic compared to a statistical characteristic of difference images generated for multiple instances of the care area on one or more other specimens. In addition, the one or more computer subsystems are configured for determining one or more changes to one or more parameters used for detecting defects in the care area on the specimen based on the variation.