KLA Corporation
System and Method for Defining Flexible Regions on a Sample During Inspection

Abstract:

A system for defining flexible regions on a sample is disclosed. The system includes an inspection system configured to acquire one or more swath images. The system includes a controller communicatively coupled to the inspection system, the controller configured to: generate one or more median reference die (MRD) images based on the one or more swath images; generate one or more flexible region masks based on the one or more MRD images; identify a set of alignment sites on the one or more flexible region masks based on one or more coordinates of the one or more MRD images; perform patch-to-mask alignment between the one or more flexible region masks and one or more scan images by aligning the scan images and the one or more MRD images at the identified set of alignment sites; and position the one or more flexible region masks on the scan images.