KLA Corporation
INTEGRATED MULTI-TOOL RETICLE INSPECTION

Abstract:

A reticle inspection system may include two or more inspection tools to generate two or more sets of inspection images for characterizing a reticle, where the two or more inspection tools include at least one reticle inspection tool providing inspection images of the reticle. The reticle inspection system may further include a controller to correlate data from the two or more sets of inspection images to positions on the reticle, detect one or more defects of interest on the reticle with the correlated data as inputs to a multi-input defect detection model, and output defect data associated with the defects of interest.