KLA Corporation
VARIATION-BASED SEGMENTATION FOR WAFER DEFECT DETECTION

Abstract:

Defects of interest and nuisance can be separated into different segments which enables detection of the defects of interest in only one segment. A region of an image can be segmented into a plurality of segments. A range attribute of the segments can be determined. Thresholding can be used to select one of the segments from the range attribute. The segment that is selected can be dilated.