KLA Corporation
PATTERN-TO-DESIGN ALIGNMENT FOR ONE-DIMENSIONAL UNIQUE STRUCTURES

Abstract:

Care areas for a first image of a die can be determined according to a 1D offset correction. The 1D offset correction can be based on 1D offsets between the first image and a second image for each of the image frames and also can be based on 1D offsets between a design and the second image for each of the image frames. The care areas can have a zero border for a dimension that is aligned to the design and a legacy border for the other dimension.