KLA Corporation
Metrology Target for Scanning Metrology

Abstract:

A metrology system may include a controller coupled to a scanning metrology tool that images a sample in motion along a scan direction. The controller may receive an image of a metrology target on the sample from the scanning metrology tool, where the metrology target comprises a first measurement group including cells distributed along a transverse orthogonal to the scan direction, and a second measurement group separated from the first measurement group along the scan direction including a cells distributed along the transverse direction, the second measurement group. The controller may further generate at least a first metrology measurement based on at least one of the first set of cells in the first metrology group, and generate at least a second metrology measurement based on at least one of the first set of cells in the second metrology group.