KLA Corporation
CONTROLLING PRESSURE IN A CAVITY OF A LIGHT SOURCE

Abstract:

Methods and systems for controlling pressure in a cavity of a light source are provided. One system includes a barometric pressure sensor configured for measuring pressure in a cavity of a light source. The system also includes one or more gas flow elements configured for controlling an amount of one or more gases in the cavity. In addition, the system includes a control subsystem configured for comparing the measured pressure to a predetermined range of values for the pressure and, when the measured pressure is outside of the predetermined range, altering a parameter of at least one of the one or more gas flow elements based on results of the comparing.